Indigo Posted December 14, 2011 Share Posted December 14, 2011 I made this in the laboratory the other day. Titanium letters deposited on a silicon substrate using electron beam lithography and lift-off metallization. Link to comment Share on other sites More sharing options...
BaalChatzaf Posted December 14, 2011 Share Posted December 14, 2011 Clever work!What equipment did you use?Ba'al Chatzaf Link to comment Share on other sites More sharing options...
Indigo Posted December 18, 2011 Author Share Posted December 18, 2011 For e-beam lithography: Hitachi S-4300 SE and a Raith ELPHY Quantum v.5 control system. PMMA A as e-beam resist. Clewin for mask design.Cressington 308R for sputter coating. Link to comment Share on other sites More sharing options...
Philip Coates Posted December 18, 2011 Share Posted December 18, 2011 Just in the past year we've now had the largest and the smallest WISG ever. Link to comment Share on other sites More sharing options...
anthony Posted December 19, 2011 Share Posted December 19, 2011 Just in the past year we've now had the largest and the smallest WISG ever.True! I forgot that. Link to comment Share on other sites More sharing options...
Indigo Posted December 24, 2011 Author Share Posted December 24, 2011 Oh, where's the largest?If I've made the smallest WIJG ever, I'm very proud of that Link to comment Share on other sites More sharing options...
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